Heat conduction for chip stacks and 3-d circuits

ABSTRACT

A semiconductor device assembly and method can include a single semiconductor layer or stacked semiconductor layers, for example semiconductor wafers or wafer sections (semiconductor dice). On each semiconductor layer, a diamond layer formed therethrough can aid in the routing and dissipation of heat. The diamond layer can include a first portion on the back of the semiconductor layer, and one or more second portions which extend vertically into the semiconductor layer, for example completely through the semiconductor layer. Thermal contact can then be made to the diamond layer to conduct heat away from the one or more semiconductor layers. A conductive via can be formed through the diamond layers to provide signal routing and heat dissipation capabilities.

CROSS REFERENCE TO RELATED APPLICATION

This application claims to the benefit of U.S. Provisional ApplicationSer. No. 61/285,325 filed Dec. 10, 2009, and to U.S. ProvisionalApplication Ser. No. 61/295,292 filed Jan. 15, 2010, both incorporatedherein by reference.

DESCRIPTION OF THE EMBODIMENTS

Reference below is made in detail to the present embodiments (exemplaryembodiments) of the present teachings, examples of which are illustratedin the accompanying drawings. Wherever possible, the same referencenumbers will be used throughout the drawings to refer to the same orlike parts. The drawings, which are incorporated in and constitute apart of this specification, illustrate embodiments of the invention andtogether with the description, serve to explain the principles of theinvention. In the figures:

FIG. 1 is a perspective view of a semiconductor device in accordancewith an embodiment of the present teachings;

FIGS. 2-6 are cross sections depicting various device structuresaccording to embodiments of the present teachings; and

FIGS. 7-13 are cross sections of intermediate structures which can beformed during a process embodiment of the present teachings to form adevice in accordance with an embodiment of the present teachings.

It should be noted that some details of the FIGS. have been simplifiedand are drawn to facilitate understanding of the inventive embodimentsrather than to maintain strict structural accuracy, detail, and scale.

A diamond layer is an efficient heat conductor. In an embodiment of thepresent disclosure, a diamond layer can be formed to provide a heatconduction path to channel heat away from the interior of a stackedmodule and/or vertically through the stacked module.

The diamond material may be undoped, for example to provide a thermallyconductive but electrically insulative layer. In other uses, the diamondlayer can include a dopant concentration to provide an electricallyconductive connector, for example P+ concentration of boron which issufficient to result in an electrically conductive and thermallyconductive diamond layer which can be used effectively to decreasesubstrate noise and substrate resistance, which can minimize devicelatch-up. Dopants can be introduced into the diamond material usingimplantation or in situ doping while the diamond is being deposited orgrown on the substrate.

FIG. 1 is a perspective view of an embodiment of the present teachings.FIG. 1 depicts a semiconductor assembly 10 which can includeinterconnect layers (circuitry) 12 formed on a front (circuit) side orsurface 14 of a semiconductor layer 16. The semiconductor assembly canbe a functional semiconductor device, a portion of a functionalsemiconductor device, or a semiconductor device which is in the processof being manufactured. The semiconductor layer can include, for example,a semiconductor wafer, a single semiconductor die, an epitaxialsemiconductor layer, a semiconductor substrate assembly including asemiconductor wafer and an epitaxial layer, a plurality ofunsingularized semiconductor dice such as a section of a semiconductorwafer.

FIG. 1 further depicts integrated circuit (IC) pads 18 such as bond padsor interconnect pads formed on the front of the semiconductor layer 16.The device of FIG. 1 further depicts heat conduction pads 20 formed onthe circuit side 14 of the semiconductor layer 16, and a diamond layer22 formed on a back (noncircuit) side or surface 24 of the semiconductorlayer 16. The diamond layer 22 can extend at least partially through thesemiconductor layer 16, or completely through the semiconductor layer asdepicted in FIG. 2.

The semiconductor layer can include one or more active devices such asmetal oxide semiconductor (MOS) devices, bipolar junction transistors(BJTs), resistors such as diffused resistors, etc. Other structures suchas seal rings, contacts, vias, metals, interlayer dielectrics,polysilicon, etc. can also be formed on and/or within the semiconductorlayer.

The FIG. 2 cross section depicts a device 30 in accordance with the FIG.1 device along A-A, subsequent to the formation of controlled collapsechip connections (“CCCC” or “C4” connections) 32, 34. Heat conductionand transfer can be provided in part by the diamond layer 22. Inaddition, through-substrate vias (TSVs) 36 can be used to pass heatvertically through the device 30. C4 connections 38 formed on the backsurface 37 of the diamond layer 22 can be connected with the TSVs 36 topass heat to an adjacent substrate. Thus, in one use, a heat transferpath 39 is provided from a surface connected to the C4 connection 34, topad 20, to TSVs 36, to C4 connection 38, then to a receiving substratesuch as a printed circuit board (PCB), another device similar to device30, or another receiving substrate. Heat transfer can occur in eitherdirection between connections 34 and 38, or away from diamond layer 22and toward both connections 34 and 38.

The diamond layer 22 can be formed to extend from the back surface 24 ofthe semiconductor layer 16 and through the semiconductor layer 16. TSVs36 can contact the diamond layer 22 and the pad 20 that has a planarsurface which is coplanar with a front (circuit) side or surface of thesemiconductor layer. Other metallization structures, for example asdepicted, can be formed.

Other C4 connections 40 can be connected to only the diamond layer 22,and can be used to transfer heat away from the diamond layer 22 to areceiving substrate to which C4 connections 40 are attached (notdepicted). In another embodiment, C4 connections 38, 40 can receive heatfrom another device, and pass the heat laterally through diamond layer22 for dissipation.

The diamond layer 22 can also provide heat conduction away from activecircuitry connected to the heat conduction pads 20 and C4 connections32. As depicted in FIG. 2, three metallization layers 42 are used toboth transfer an electrical input/output (I/O) signal laterally throughcircuitry to other devices or device circuitry, and to transfer heatwhich is generated during device operation vertically along a path 43 tothe diamond layer 22 for conduction away from the circuit. Themetallization layers 42 formed over the front surface of thesemiconductor layer 16 can include one or more conductors. Additionally,one or more dielectric layers 44 and passivation layers 46 can be formedfor electrical isolation.

The FIG. 2 device 30 can be formed using a commercially-availablediamond-backed wafer, such as a silicon wafer, or the diamond layer onthe back can be grown, attached, or otherwise positioned on the back ofthe wafer. An etch that is selective to diamond (i.e. which etches thediamond at a lower rate than it etches silicon) can be used to etchthrough the front silicon surface to expose the diamond from the frontof the wafer through a trench, a via, or another opening (referred toherein collectively as a “trench” or “opening”). Thus the silicon isetched from the circuit side and the diamond is exposed from the frontsurface of the silicon. Next, a diamond growth process can be performedto grow the diamond on the exposed planar diamond layer and through theopening in the silicon, for example using a diamond refill process. Thebackside diamond layer, which provides a diamond crystal structure, canfunction as a diamond crystallization nucleus during the diamond growththrough the opening. A diamond deposition method can include, forexample, hot filament decomposition of methane at a temperature of about700° C.

Once the diamond has been grown to extend through the opening in thesilicon layer, the diamond can be planarized, for example using achemical mechanical polishing (CMP) process or an etch to planarize theupper surface. The diamond layer which is grown to extend through theopening in the silicon can be planarized such that it is generallycoplanar with the semiconductor layer front surface. Thus the structureof FIG. 2 includes a diamond layer 22 having a planar lower portion andvertically oriented diamond layer portions which extend from the lowerplanar layer and through the semiconductor layer 16, which can becoplanar with the front surface 14 of the semiconductor layer 16.

In use of the semiconductor device 30, the topography of the FIG. 2device 30 can be employed using the diamond-filled trench areas and thecontact to the heat conduction pads 20 to transmit heat vertically awayfrom the semiconductor layer 16 to the diamond layer 22. The C4connections 32 (a ball grid array “BGA,” for example) depicted on theleft side of FIG. 2 can therefore be used for the conduction of heataway from a surface to which the C4 connections are attached, throughmetallization layers 42, and to diamond layer 22. The heat can then beconducted through C4 connection to a receiving substrate. Heat can alsobe conducted laterally through diamond layer 22.

FIG. 3 depicts a magnified view of a portion of a heat conduction pad ofFIG. 2 (the two left-side structures of FIG. 2 including C4 connections32). The diamond substrate layer 52 and diamond trench refill 54 can beused to conduct heat rapidly away from the semiconductor layer 16 duringsubsequent use of the device. Heat conduction to the top of the diamondtrench refill 54 can be provided by the metal system (metallization)used in the metallization layers (42 in FIG. 2). In this specific case,three levels of metal are used to form structures 56-66, which can beformed using a metal damascene process and three dielectric layers44A-44C. A pad opening 50 through passivation 46 can expose the topmetal 66 to complete the heat conduction pad as depicted.

The FIG. 3 structure can include a Metal 1 layer to form contacts 56 tothe diamond refill 54 and metal interconnect layer 58, a Metal 2 layerto form vias 60 to metal layer 58 and metal interconnect layer 62, and aMetal 3 layer to form vias 64 and metal interconnect layer 66. In thisuse, the contacts 56 are not used to pass an electrical signal todiamond trench refill 54, while vias 60, 64 pass an electrical signalbetween layers 58 and 62, and layer 62 and 66 respectively. Thus thesethree metal layers include a contact layer 56 to the diamond refill 54and two via levels 60, 64. The C4 interconnect 32 can be used to provideheat conduction from the top of the pad 66 to another chip assembly,which can be similar to the assembly of FIGS. 2 and 3. The back side C4connection 40 can be used to thermally couple back side diamond layer 52to a receiving substrate (not shown). Thus heat can be passed fromsilicon layer 16, to diamond layer 52, to C4 connection 40, to areceiving substrate. In another use, heat can be passed from a pad ofanother device, to C4 connection 40, to diamond layer 52, and laterallythrough diamond layer 52 to a heat sink for dissipation. In anembodiment, conductor 40 is adapted to conduct heat to or away from thediamond layer during device operation, but is not adapted to conduct anelectrical signal during device operation.

FIG. 4 depicts a magnified view of a portion of a heat conduction pad ofFIG. 2 (the right-side structure of FIG. 2). In this embodiment, C4structure 34 of FIG. 2 will not be formed on this device, but will beprovided by another device similar to that of the FIG. 4 device. C4connection 38 will be formed to receive heat from metal 58-66, and fromanother device connected to metal 66, through TSVs 36. After formingbond pad 20 of FIG. 2, a C4 structure similar to 38 on another devicecan be attached to the metal 66 so that heat can be transferred throughvias 36 to pad 68 and to C4 connection 38. This can provide a stackeddevice design with improved thermal handling over previous stackeddevices.

Thus FIG. 4 depicts TSVs 36 processed from the back side of thesilicon-diamond IC substrate 16, 52, 54 which can be used to route heatfrom or to another device. A TSV formation process can include a trenchetch through the back side diamond layer 52, through silicon 16, andthrough dielectric layer 44C to expose Metal 1 58 from the back side ofthe silicon-diamond composite wafer through one or more via openings. Asubsequent conductive layer deposition, for example using a metal refillof tungsten, can fill the one or more vias to provide electrical contactto Metal 1 structure 58. A patterned conductive backside pad 68,followed by a solder ball process such as a C4 process to form C4connection 38, can be used to complete the TSV contact to Metal 1. OtherTSV formation processes could be used, including processes that createthe TSV from the front side of the wafer. In an embodiment, the TSVrefill material is limited only to materials that do not chemicallyinteract with diamond. in another embodiment, TSV liners can be formedon diamond sidewalls, for example from nitride and silicon dioxide. Theliners can electrically insulate the conductor from the diamond and/orto the substrate. Undoped diamond can be formed as an insulation layer,however, and is compatible with a wide range of TSV refill materials andmetals. In other embodiments, the conductor can physically contact aconductively doped diamond layer to provide substrate contacts withimproved thermal conduction.

A process resulting in a structure similar to FIG. 4 can include theformation of insulating diamond “fingers” 54 that extend through thesilicon layer 16 to encircle the central silicon portion 70 of siliconlayer 16 through which the TSVs 36 are formed. While the FIG. 4 crosssection depicts two vertical fingers 54, one on either side of thecentral semiconductor region 70, the vertical diamond structures canform one continuous region completely around the perimeter of thecentral silicon region 70 through which TSVs 36 extend. Because thediamond in this embodiment is an insulator, the central silicon portion70 is electrically isolated from other conductive or semiconductivestructures formed in the silicon layer 16. Thus no additional isolationis needed to electrically isolate the metal TSVs 36 from the siliconlayer 16, because isolation of the TSV metal refill from thesemiconductor layer is provided through the use of the diamond-filledtrench isolation 54 surrounding the TSVs 36.

FIG. 5 depicts a plurality of stacked semiconductor assemblies, such assemiconductor wafers, semiconductor wafer substrate assemblies, orsemiconductor wafer sections, for example semiconductor dice. Stackedchips or 3D IC's can be wired electrically and thermally usingdiamond-based substrates, diamond trench refills, and heat conductionpads. FIG. 5 illustrates one embodiment of the present teachings forstacking three IC's. A bond pad with one or more TSVs can be used forI/O routing, while the heat conduction pads can be used for thermalrouting.

The FIG. 5 stacked semiconductor assembly 100 can include first 102,second 104, and third 106 stacked semiconductor dice. The stackedassembly can include various structures of previous embodiments formedusing similar methods. FIG. 5 further depicts dielectric 108 that can beused to mechanically attach each of the semiconductor dice 102-106together.

C4 connections 40 can provide thermally conductive connections toconduct heat away from the stacked assembly 100. C4 connections 40 canbe attached to pads 105 on a receiving substrate 107, for example usingsolder reflow of C4 connections 38, 40. In an embodiment, C4 connections38, 40 are adapted to provide heat conduction away from diamond layer22. A thermally conductive path from chip 102 to chip 104 can besupplied by C4 connections 32 and 38 that are interposed between chip102 and chip 104, as well as TSVs 36. A thermally conductive path fromchip 104 to chip 106 can be supplied by C4 connections 32 and 38 thatare interposed between chip 104 and chip 106, as well as TSVs 36.Metallization layers 42 can provide both electrical routing of signalsand thermal routing of heat between the chips. Other thermal connectionscan be made laterally at the edges of diamond layer 22, for example toconnect with a heat spreader 109, for example a heat sink, such that theheat is dissipated horizontally through diamond layer 22 as well asdissipation through C4 connections 38, 40.

Thus the stacked IC assembly can be formed as a package or module 100.The C4 connections 38, 40 can be attached to pads 105 on a receivingsubstrate 107. Heat generated by the IC's can be efficiently conductedaway from the one or more semiconductor layers to the receivingsubstrate 107 and/or to a heat spreader 109 where it can be dissipated,thereby reducing adverse effects from excessive thermal levels.

FIG. 6 depicts a device 110 which can be formed and provided inaccordance with another embodiment of the present teachings. Thisembodiment can include a semiconductor layer 112 such as a semiconductorwafer or wafer section. A diamond layer 114 can be formed on the back ofthe semiconductor layer 112, or a preformed diamond layer can beattached to a semiconductor wafer. A diamond trench refill process canbe used to form a diamond trench refill 116 through an opening in thesemiconductor layer 112. To form the diamond trench refill 116, anopening can be etched into the semiconductor layer 112 from a front(circuit) side 118 of the semiconductor layer 112 to expose the backside diamond layer 114 from the semiconductor layer side, then thediamond layer 114 can be used as a crystallization nucleus to growdiamond trench refill 116 through the opening. A planarization step, forexample using CMP, can be used to planarize any diamond trench refillportion extending through the opening beyond the front surface 118 ofsemiconductor layer 112.

FIG. 6 further depicts a Metal 1 layer that forms pad 120, a Metal 2layer which can form both vias 122 and pad 124, and a Metal 3 layer thatcan form vias 126 and pad 128.

Next, through-diamond vias (TDVs) 130 can be formed by anisotropicallyetching through both the diamond layer 114 and the diamond trench refill116 from the exposed side of 132 of the diamond layer 114 to form one ormore TDV openings. The etch continues through the diamond layer 114 andthe diamond trench refill 116 to expose the back side of the Metal 1 pad120. A metal layer using, for example, a tungsten refill process or achemical vapor deposition (CVD) process, can be formed to fill the TDVopenings with conductor.

Next, a pad metallization process can be used to form a pad 134 such asa bond pad, and a solder ball 136 such as a C4 ball, ball grid array(BGA) structure, or other conductor can be formed on pad 134. Aprotective passivation layer 138 can be formed to complete the structureof FIG. 6.

The structure of FIG. 6 can be used to provide I/O routing through boththe diamond layer 114 and the diamond refill 116. In this embodiment,the TDV structures 130 do not pass through the semiconductor substrate112. Since the two diamond structures 114, 116 can be electricalinsulators, the openings do not need to be lined with a dielectric toelectrically isolate the TDVs from the semiconductor substrate, andother isolation techniques are not necessary. The conductive vias 130are electrically isolated from the semiconductor layer by the diamondlayer. As depicted in FIG. 6, a portion of both the diamond layer 116and the conductive vias 130 are directly interposed between portions ofsemiconductor layer 112.

The FIG. 6 structure combines both heat conduction and signal conduction(I/O routing) through the diamond layers 114, 116, providing a valuablesavings in die area. The structure can have various advantages. Forexample, the structure can be used with many or all metal systems.Further, it can provide a die-to-die attachment using a C4 process, aninterposer, and copper-to-copper (Cu—Cu) wafer and/or die bonding, etc.Additionally, the structure can include the use of through-siliconand/or though-substrate via technology, along with one or more diamondfilled trenches. Various electrical isolation processes and structureswhich may be required with conventional through silicon vias are notnecessary in an embodiment of the invention, for example because theTDVs do not pass through silicon.

Some semiconductor assemblies can include one or more semiconductor diewhich includes a diamond layer for thermal conduction and/or electricalinsulation, and one or more semiconductor die which does not include adiamond layer. Other embodiments can include a semiconductor layer withat least two openings, one filled with a conductor and the other filledwith a diamond layer. The diamond layer can be either an electricalconductor, for example through the use of P-type dopants or N-typedopants (depending on whether the device is PMOS or NMOS), or anelectrical insulator.

In another embodiment, the diamond layer can be conductively doped toprovide electrical conduction as well as thermal conduction.

A method for forming a semiconductor assembly including a diamond layerthrough a semiconductor layer such as a semiconductor wafer is depictedin FIGS. 7-13. FIG. 7 depicts a semiconductor layer 200 and a diamondlayer 202 covering a side, for example a back side, of the semiconductorlayer 200. The diamond layer 202 can be formed separately from thesemiconductor layer and attached to the back side of the semiconductorlayer using an oxide layer. In other processes, the diamond layer can begrown or deposited on the back side of the semiconductor layer.

After providing the diamond layer and the semiconductor layer, apatterned mask 204, such as a photoresist layer, is formed on a side,for example a front side, of the semiconductor layer 200 to haveopenings 206 which expose the front side of the semiconductor layer 200.

Next, a first portion of the semiconductor layer 200 is removed, forexample by etching, to form one or more openings in the semiconductorlayer 200 to expose the diamond layer 202 from the front side of thesemiconductor layer as depicted in FIG. 8. The one or more openings inthe semiconductor layer 200 extends from the front side of thesemiconductor layer to the back side.

Subsequently, the exposed diamond layer 202 can be used as acrystallization nucleus to grow diamond layer portions 208 through theopenings etched in the semiconductor layer. The growth process can bestopped when the grown diamond layer portions 208 are even with thefront of the semiconductor layer 200, or the growth process can continueas until the grown diamond layer portions 208 extend through theopenings as depicted in FIG. 9. The grown diamond layer 208 extendsthrough the opening.

A spun-on or deposited fill layer 210 can be formed over the front ofthe semiconductor layer 200 and the grown diamond layer 208 as depictedin FIG. 9, then the fill layer and grown diamond layer 208 can beplanarized, for example using CMP, to result in the FIG. 10 structure.The fill layer may protect the semiconductor layer during CMP.

Next, a patterned mask 220 is formed over the semiconductor layer 200and grown diamond layer 208 as depicted in FIG. 11. The mask hasopenings therein to define TSVs through the grown diamond layer 208 andthe semiconductor layer 200. The structure of FIG. 11 is etched to formfirst openings through the grown diamond layer 208, second openingsthrough the semiconductor layer 200, and to etch through the diamondlayer 202 on the back side of the semiconductor layer to result in theFIG. 12 structure. Subsequently, the mask 220 can be removed to resultin the FIG. 13 structure.

By filling the openings in FIG. 13 with a conductor such as a metal,TSVs similar to TSVs 36, 130 of prior FIGS. can be formed. The openingscan be lined with a dielectric such as oxide to provide TSVs which areelectrically insulated from the semiconductor layer 200, back sidediamond layer 202, and grown diamond layer 208. In an alternateembodiment, the TSVs can be formed through grown diamond layer 208 usinga first mask, and the TSVs can be formed at a different time throughsemiconductor layer 200 using a second mask.

It will be appreciated that the FIGS. may omit various elements such aselectrical interconnect layers and semiconductor device diffusions,conductors, and dielectrics to more clearly illustrate features of theheat conduction pad and thermal management. Further, FIGS. 2-6 depict aC4 method of chip-to-chip connection. Other examples of chip-to-chipconnections, for example using an interposer, etc., can be used ifsufficient thermal conductivity can be maintained in the connection forthe heat conduction pads.

Notwithstanding that the numerical ranges and parameters setting forththe broad scope of the invention are approximations, the numericalvalues set forth in the specific examples are reported as precisely aspossible. Any numerical value, however, inherently contains certainerrors necessarily resulting from the standard deviation found in theirrespective testing measurements. Moreover, all ranges disclosed hereinare to be understood to encompass any and all sub-ranges subsumedtherein. For example, a range of “less than 10” can include any and allsub-ranges between (and including) the minimum value of zero and themaximum value of 10, that is, any and all sub-ranges having a minimumvalue of equal to or greater than zero and a maximum value of equal toor less than 10, e.g., 1 to 5. In certain cases, the numerical values asstated for the parameter can take on negative values. In this case, theexample value of range stated as “less that 10” can assume negativevalues, e.g. −1, −2, −3, −10, −20, −30, etc.

While the invention has been illustrated with respect to one or moreimplementations, alterations and/or modifications can be made to theillustrated examples without departing from the spirit and scope of theappended claims. In addition, while a particular feature of theinvention may have been disclosed with respect to only one of severalimplementations, such feature may be combined with one or more otherfeatures of the other implementations as may be desired and advantageousfor any given or particular function. Furthermore, to the extent thatthe terms “including,” “includes,” “having,” “has,” “with,” or variantsthereof are used in either the detailed description and the claims, suchterms are intended to be inclusive in a manner similar to the term“comprising.” The term “at least one of” is used to mean one or more ofthe listed items can be selected. Further, in the discussion and claimsherein, the term “on” used with respect to two materials, one “on” theother, means at least some contact between the materials, while “over”means the materials are in proximity, but possibly with one or moreadditional intervening materials such that contact is possible but notrequired. Neither “on” nor “over” implies any directionality as usedherein. The term “conformal” describes a coating material in whichangles of the underlying material are preserved by the conformalmaterial. The term “about” indicates that the value listed may besomewhat altered, as long as the alteration does not result innonconformance of the process or structure to the illustratedembodiment. Finally, “exemplary” indicates the description is used as anexample, rather than implying that it is an ideal. Other embodiments ofthe invention will be apparent to those skilled in the art fromconsideration of the specification and practice of the inventiondisclosed herein. It is intended that the specification and examples beconsidered as exemplary only, with a true scope and spirit of theinvention being indicated by the following claims.

Terms of relative position as used in this application are defined basedon a plane parallel to the conventional plane or working surface of awafer or substrate, regardless of the orientation of the wafer orsubstrate. The term “horizontal” or “lateral” as used in thisapplication is defined as a plane parallel to the conventional plane orworking surface of a wafer or substrate, regardless of the orientationof the wafer or substrate. The term “vertical” refers to a directionperpendicular to the horizontal. Terms such as “on,” “side” (as in“sidewall”), “higher,” “lower,” “over,” “top,” and “under” are definedwith respect to the conventional plane or working surface being on thetop surface of the wafer or substrate, regardless of the orientation ofthe wafer or substrate.

1. A semiconductor assembly, comprising; a semiconductor layercomprising a front side, a back side, and an opening therethroughextending from the back side to the front side; and a diamond layerextending through the opening and comprising a first surface at thefront side of the semiconductor layer and a second surface at the backside of the semiconductor layer.
 2. The semiconductor assembly of claim1, wherein: the diamond layer provides an electrical connector; or thediamond layer provides a nonconductive heat sink.
 3. The semiconductorassembly of claim 1 wherein the diamond layer comprises: a first portionextending through the opening; and a second portion covering the backside of the semiconductor layer.
 4. The semiconductor assembly of claim1 wherein the semiconductor layer is a first semiconductor layer, andthe semiconductor assembly further comprises: a second semiconductorlayer attached to the front side of the first semiconductor layer,wherein the second semiconductor layer comprises: a back side, a frontside, and an opening extending from the back side of the secondsemiconductor layer to the front side of the second semiconductor layer;a diamond layer extending through the opening in the secondsemiconductor layer and comprising a first exposed surface at the frontside of the second semiconductor layer and a second surface at the backside of the second semiconductor layer; and a thermally conductiveconnection to the diamond layer, wherein the thermally conductiveconnection is adapted to conduct heat away from the first and secondsemiconductor layers during operation of the semiconductor assembly. 5.The semiconductor assembly of claim 1, further comprising: the diamondlayer is an electrical insulator; and a conductive via within thediamond layer and contacting the diamond layer, wherein the conductivevia is electrically isolated from the semiconductor layer by the diamondlayer.
 6. The semiconductor assembly of claim 5, further comprising: atleast a portion of the conductive via is directly interposed betweenportions of the semiconductor layer; and at least a portion of thediamond layer is directly interposed between portions of thesemiconductor layer.
 7. The semiconductor assembly of claim 1, furthercomprising: the diamond layer is an electrical conductor and comprisesan opening therein; and a conductive via within the opening in thediamond layer and contacting the diamond layer, wherein the conductivevia is electrically connected to the semiconductor layer through thediamond layer.
 8. The semiconductor assembly of claim 1, furthercomprising: the diamond layer is an electrical conductor and comprisesan opening therein; a dielectric liner which lines the opening in thediamond layer; and a conductive via within the opening in the diamondlayer, wherein the dielectric liner electrically isolates the conductivevia from the diamond layer.
 9. The semiconductor assembly of claim 1,further comprising: the diamond layer is an electrical insulator; anelectrically conductive layer attached to the diamond layer, wherein theelectrically conductive layer is adapted to conduct heat to or away fromthe diamond layer, and is not adapted to conduct an electrical signalduring operation of the semiconductor assembly.
 10. The semiconductorassembly of claim 1, wherein the diamond layer extending through theopening is electrically conductive.
 11. The semiconductor assembly ofclaim 1, wherein the diamond layer extending through the opening is anelectrical insulator.
 12. The semiconductor assembly of claim 1 whereinthe opening is a first opening and the semiconductor assembly furthercomprises: the semiconductor layer further comprises a second openingtherethrough extending from the back side to the front side; and aconductive layer which fills the second opening in the semiconductorlayer.
 13. The semiconductor assembly of claim 12, wherein the diamondlayer is an electrically conductive diamond layer.
 14. The semiconductorassembly of claim 12, further comprising a p-type dopant within thediamond layer at a concentration sufficient to result in an electricallyconductive diamond layer.
 15. The semiconductor assembly of claim 12,wherein the diamond layer is an electrical insulator.
 16. Asemiconductor assembly, comprising: a semiconductor layer having a frontside, a back side, and an opening therethrough extending from the backside to the front side; a first portion of a diamond layer extendingthrough the opening and comprising a first surface at the front side ofthe semiconductor layer and a second surface at the back side of thesemiconductor layer; a second portion of a diamond layer covering theback side of the semiconductor layer; an opening extending through boththe first portion of the diamond layer and the second portion of thediamond layer; and a conductor that fills the opening extending throughboth the first portion of the diamond layer and the second portion ofthe diamond layer to provide a conductive path extending between thefront side of the semiconductor layer and the back side of thesemiconductor layer.
 17. The semiconductor assembly of claim 16, furthercomprising: the conductor that fills the opening provides a conductivepath extending between a front surface of the first portion of thediamond layer and a back surface of the second portion of the diamondlayer.
 18. The semiconductor assembly of claim 17, further comprising:the first portion of the diamond layer is an electrical insulator; andthe conductor that fills the opening is electrically isolated from thesemiconductor layer by the first portion of the diamond layer. 19-25.(canceled)
 26. A semiconductor assembly, comprising: a semiconductorlayer comprising a front side, a back side, and an opening therethroughextending from the back side to the front side, the opening defining aperimeter of an isolated portion of the semiconductor layer; a diamondlayer on the back side of the semiconductor layer; and a diamond portionextending through the opening.
 27. The semiconductor assembly of claim26, wherein the diamond portion is electrically insulating therebyelectrically isolating the isolated portion of the semiconductor layerfrom other portions of the semiconductor layer.
 28. The semiconductorassembly of claim 26, one or more conductive through substrate viasextending through the isolated portion of the semiconductor layer andthe diamond layer.